Wafer carrying system

ABSTRACT

The purpose of the present invention is to provide a wafer carrying system with a manual-opened cover. The wafer carrying system of the present invention includes a wafer cassette having an opening, a cover disposed on the wafer cassette for covering the opening of the wafer cassette, an opener disposed on the cover for opening the cover, a base for mounting the opener thereon, a separating device connected with the base and the opener, thereby the cover being movable from a shut position to a separated position, a first pivoting device connected to the separating device for pivoting the cover to a first specific position, and a second pivoting device connected to the first pivoting device for pivoting the cover to a second specific position.

FIELD OF THE INVENTION

The present invention is related to a wafer carrying system and moreparticularly, to a wafer carrying system with a manual-opened cover.

BACKGROUND OF THE INVENTION

In the recent development of semiconductor fabrication technology, thecontinuous miniaturization in IC devices demands more stringentrequirements in the fabrication environment and contamination control.It has been recognized that an inert mini-environment may be the onlysolution to future fabrication technologies when the device size isfurther reduced. In order to eliminate micro-contamination and to reducenative oxide growth on silicon surfaces, the wafer processing and theloading/unloading procedures of a process tool must be enclosed in anextremely high cleanliness mini-environment that is constantly flushedwith ultrapure nitrogen that contains no oxygen or moisture. In order tomaintain the high cleanliness class inside the process tool the loadingand unloading sections of the process tool must be handled automaticallyby an input/output device such as a SMIF (standard mechanicalinterfaces) apparatus. A cassette of wafer can be transported into theprocess tool by a SMIF pod situated-on top of the SMIF apparatus.

Usually, wafer cassettes having sealing cover can be divided into twotypes, the mechanical-opened and the manual-opened. Wafer cassetteshaving mechanical-opened cover are always used in SMIF apparatus, andwafer cassettes having manual-opened cover are always used by means ofmaneuvering.

Please refer to FIGS. 1 and 2. They illustrate a wafer carrying systemhaving manual-opened cover according to the prior art. The wafercarrying system includes a wafer cassette 10 and a cover 11. Meanwhilethe wafer cassette 10 and the cover 11 have to be integrated via anopener, as shown in FIG. 2. The opener 20 includes two protrudentdevices for engaging into two controlling troughs 12 of the cover 11, soas to rotate the two controlling troughs 12 to drive four tenons 13thereof, thereby four tenons 13 being engaged into four troughs 14 andthe combination of the wafer cassette 10 and the cover 11 finishing.Plural wafers 15 carried by said wafer cassette 10 are placed in anisolating region from the dust and the static electricity.

When separating the combination of the wafer cassette 10 and the cover11, and opening the cover 11, an operator must use the opener 20. Theoperator pull a handle 21 of the opener 20 for rotating the twocontrolling troughs 12 to drive the four tenons 13. Then the cover 11can be opened, but the operator has to take away the cover 11 with theopener 20 and find some space to place the cover 11 with the opener 20.After wafer 15 is taken out from the wafer cassette 10, the operatortakes the cover 11 with the opener 20 to execute the above steps forcombining the wafer cassette 10 and the cover 11 to close. It is notconvenient to execute such complicated steps and provide extra space forplacing the cover 11 with the opener 20. The wafer carrying system istherefore of limited use.

Therefore, it is tried to rectify those drawbacks and provide a wafercassette with a manual-opened cover by the present applicant.

SUMMARY OF THE INVENTION

It is therefore a primary objective of the present invention to providea wafer carrying system with a manual-opened cover, which can beoperated easily.

According to the present invention, the wafer carrying system includes awafer cassette having an opening, a cover disposed on the wafer cassettefor covering the opening of the wafer cassette, an opener disposed onthe cover for opening the cover, a base for mounting the opener thereon,a separating device connected with the base and the opener, thereby thecover being movable from a shut position to a separated position, afirst pivoting device connected to the separating device for pivotingthe cover to a first specific position, and a second pivoting deviceconnected to the first pivoting device for pivoting the cover to asecond specific position.

Certainly, the separating device can be a movable shaft, and the basefurther comprises a carrying device for carrying the movable shaft.

Certainly, the movable shaft can be movable on the carrying device formoving the cover between the shut position and the separated position.

Preferably, the carrying device further includes a rotatable discconnected to the movable shaft for moving the movable shaft.

Preferably, the carrying device further includes an arc recess forfacilitating a movement of the movable shaft.

Preferably, the separating device further includes a positioning devicefor positioning the first pivoting device on the separating device.

Preferably, the cover rotates 90° from the separated position to thefirst position.

Preferably, the second pivoting device further includes an engagingshaft engaging with the first pivoting device for rotating the secondpivoting device on the first pivoting device.

Preferably, the cover rotates 90° from the first position to the secondposition.

Preferably, the opener further includes a “n”-shaped handle foroperating the opener more easily.

Certainly, the opener can be moved on the base via the separatingdevice.

According to the present invention, the wafer carrying system includes awafer cassette having an opening, a cover disposed on the wafer cassettefor covering the opening of the wafer cassette, an opener disposed onthe cover for opening the cover, a base for mounting the opener thereon,a separating device connected with the base and the opener, thereby thecover being movable from a shut position to a separated position, and afirst pivoting device connected to the separating device for pivotingthe cover to a first specific position.

Preferably, the wafer carrying system further includes a second pivotingdevice connected to the first pivoting device for pivoting the cover toa second specific position.

According to the present invention, the wafer carrying system includes awafer cassette having an opening, a cover disposed on the wafer cassettefor covering the opening of the wafer cassette, an opener disposed onthe cover for opening the cover, a base for mounting the opener thereon,and a separating device connected with the base and the opener, therebythe cover being moved from a shut position to a separated position.

Preferably, the wafer carrying system further includes a first pivotingdevice connected to the separating device for pivoting the cover to afirst specific position.

According to the present invention, the wafer carrying system includes awafer cassette having an opening, a cover disposed on the wafer cassettefor covering the opening of the wafer cassette, an opener disposed onthe cover for opening the cover, and a separating device connected withthe opener, thereby the cover being movable from a shut position to aseparated position.

Preferably, the wafer carrying system further includes a base connectedwith the separating device for mounting the opener thereon.

According to the present invention, the wafer carrying system includes awafer cassette having an opening, a cover disposed on the wafer cassettefor covering the opening of the wafer cassette, an opener disposed onthe cover for opening the cover; wherein the cover is movable from ashut position to a separated position.

Preferably, the wafer carrying system further includes a separatingdevice connected with the opener for moving the opener, thereby thecover being movable from the shut position to the separated position.

The foregoing and other features and advantages of the present inventionwill be more clearly understood through the following descriptions withreference to the drawings, wherein:

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 illustrates a wafer carrying system with a cover according to theprior art;

FIG. 2 illustrates an opener for opening the cover of the wafer carryingsystem of FIG. 1;

FIG. 3 illustrates a first embodiment of a wafer carrying systemaccording to the present invention;

FIG. 4 illustrates the cover moved to the separated position accordingto the present invention;

FIG. 5 illustrates a front view of the first pivoting device and theopener of FIG. 1;

FIG. 6 illustrates the cover pivoted to the first pivoting position viathe first pivoting device according to the present invention;

FIG. 7 illustrates the cover pivoted to the second pivoting position viathe second pivoting device according to the present invention;

FIG. 8 illustrates a lateral view of the movable shaft and the baseaccording to the present invention;

FIG. 9 illustrates a stereopicture of the opener and the base accordingto the present invention; and

FIG. 10 illustrates another embodiment of the wafer carrying systemaccording to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Please refer to FIGS. 3-7. They illustrate a wafer carrying system witha manual-opened cover according to the present invention. The wafercarrying system includes a wafer cassette 30 having an opening 301, acover 31 disposed on the wafer cassette 30 for covering the opening ofthe wafer cassette 30, an opener 32 disposed on the cover 31 for openingthe cover 31, a base 33 for mounting the opener 32 thereon, a separatingdevice 34 connected with the base 33 and the opener 32, thereby thecover being movable from a shut position 35 (shown in FIG. 3) to aseparated position 40 (shown in FIG. 4), a first pivoting device 50connected to the separating device 34 for pivoting the cover 31 to afirst specific position 60, and a second pivoting device 51 connected tothe first pivoting device 50 for pivoting the cover 31 to a secondspecific position 70.

In FIG. 5, it illustrates a switch 52 of the opener 32 of the FIG. 3 forcontrolling the cover 31, thereby the cover 31 being separated to theseparated position 40 via the opener 32 and the raw wafers being takenin the direction AR (shown in FIG. 4). The separating device 34 is amovable shaft, and the base 33 further comprises a carrying device 80for carrying the movable shaft 34. Certainly, the movable shaft 34 canbe movable on the carrying device 80 for moving the cover 31 between theshut position 35 and the separated position 40. Preferably, the carryingdevice 80 further includes a rotatable disc 81 connected to the movableshaft 34 for moving the movable shaft 34. Additionally, the carryingdevice 80 could include an arc recess 36 for facilitating a movement ofthe movable shaft 34.

In the embodiment of the present invention, the separating device 34further includes a positioning device 53 for positioning the firstpivoting device 50 on the separating device 34, wherein the cover 31could rotate 90° from the separated position 40 to the first position60. The second pivoting device 51 further includes an engaging shaft 54engaging with the first pivoting device 50 for rotating the secondpivoting device 51 on the first pivoting device 50, wherein the cover 31could rotate 90° from the first position 60 to the second position 70.Please refer to FIG. 9. For being operated more easily, the opener 32disposed on the base 33 further includes a “n”-shaped handle 90. Theopener 32 can be moved on the base 33 via the separating device 34. FIG.9 illustrates how the opener 32 is disposed on the base 33.

The wafer carrying system of the present invention could be simplified.The wafer carrying system includes a wafer cassette 30 having an opening301, a cover 31 disposed on the wafer cassette 30 for covering theopening 301 of the wafer cassette 30, an opener 32 disposed on the cover31 for opening the cover 31, a base 33 for mounting the opener 32thereon, a separating device 34 connected with the base 33 and theopener 32, thereby the cover 31 being movable from a shut position 35 toa separated position 40, and a first pivoting device 51 connected to theseparating device 34 for pivoting the cover 31 to a first specificposition 60. Certainly, the wafer carrying system could further includea second pivoting device 51 connected to the first pivoting device 50for pivoting the cover 31 to a second specific position 70. Furthermore,the base 33 of FIG. 9 could be changed into arc-shaped base 100, shownin FIG. 10.

Similarly, the wafer carrying system of the present invention could bealso simplified as a wafer carrying system including a wafer cassette 30having an opening 301, a cover 31 disposed on the wafer cassette 30 forcovering the opening 301 of the wafer cassette 30, an opener 32 disposedon the cover 31 for opening the cover 31, a base 33 for mounting theopener 32 thereon, and a separating device 34 connected with the base 33and the opener 32, thereby the cover 31 being movable from a shutposition 35 to a separated position 40.

According to the present invention, the wafer carrying system could bealso simplified as a wafer carrying system including a wafer cassette 30having an opening 301, a cover 31 disposed on the wafer cassette 30 forcovering the opening 301 of the wafer cassette 30, an opener 32 disposedon the cover 31 for opening the cover 31, and a separating device 34connected with the base 33 and the opener 32, thereby the cover 31 beingmovable from a shut position 35 to a separated position 40.

While the invention has been described in terms of what are presentlyconsidered to be the most practical and preferred embodiments, it is tobe understood that the invention need not to be limited to the disclosedembodiment. On the contrary, it is intended to cover variousmodifications and similar arrangements included within the spirit andscope of the appended claims, which are to be accorded with the broadestinterpretation so as to encompass all such modifications and similarstructures.

1. A wafer carrying system comprising: a wafer cassette having anopening; a cover disposed on said wafer cassette for covering saidopening of said wafer cassette; an opener disposed on said cover foropening said cover; a base for mounting said opener thereon; aseparating device connected with said base and said opener, thereby saidcover being movable from a shut position to a separated position; afirst pivoting device connected to said separating device for pivotingsaid cover to a first specific position; and a second pivoting deviceconnected to said first pivoting davice for pivoting said cover to asecond specific position.
 2. The wafer carrying system according toclaim 1, wherein said separating device is a movable shaft, and saidbase further comprises a carrying device for carrying said movableshaft.
 3. The wafer carrying system according to claim 2, wherein saidmovable shaft is movable on said carrying device for moving said coverbetween said shut position and said separated position.
 4. The wafercarrying system according to claim 3, wherein said carrying devicefurther comprises a rotatable disc connected to said movable shaft formoving said movable shaft.
 5. The wafer carrying system according toclaim 3, wherein said carrying device further comprises an arc recessfor facilitating a movement of said movable shaft.
 6. The wafer carryingsystem according to claim 1, wherein said separating device furthercomprises a positioning device for positioning said first pivotingdevice on said separating device.
 7. The wafer carrying system accordingto claim 6, wherein said cover rotates 90° from said separated positionto said first position.
 8. The wafer carrying system according to claim7, wherein said second pivoting device further comprises an engagingshaft engaging with said first pivoting device for rotating said secondpivoting device on said first pivoting device.
 9. The wafer carryingsystem according to claim 8, wherein said cover rotates 90° from saidfirst position to said second position.
 10. The wafer carrying systemaccording to claim 1, wherein said opener further comprises a “n”-shapedhandle for operating said opener more easily.
 11. The wafer carryingsystem according to claim 1, wherein said opener is moved on said basevia said separating device.
 12. A wafer carrying system comprising: awafer cassette having an opening; a cover disposed on said wafercassette for covering said opening of said wafer cassette; an openerdisposed on said cover for opening said cover; a base for mounting saidopener thereon; a separating device connected with said base and saidopener, thereby said cover being movable from a shut position to aseparated position; and a first pivoting device connected to saidseparating device for pivoting said cover to a first specific position.13. The wafer carrying system according to claim 12 further comprising asecond pivoting device connected to said first pivoting device forpivoting said cover to a second specific position.
 14. A wafer carryingsystem comprising: a wafer cassette having an opening; a cover disposedon said wafer cassette for covering said opening of said wafer cassette;an opener disposed on said cover for opening said cover; a base formounting said opener thereon; and a separating device connected withsaid base and said opener, thereby said cover being moved from a shutposition to a separated position.
 15. The wafer carrying systemaccording to claim 14 further comprising a first pivoting deviceconnected to said separating device for pivoting said cover to a firstspecific position.
 16. A wafer carrying system comprising: a wafercassette having an opening; a cover disposed on said wafer cassette forcovering said opening of said wafer cassette; an opener disposed on saidcover for opening said cover; and a separating device connected withsaid opener, thereby said cover being movable from a shut position to aseparated position.
 17. The wafer carrying system according to claim 16further comprising a base connected with said separating device formounting said opener thereon.
 18. A wafer carrying system comprising: awafer cassette having an opening; a cover disposed on said wafercassette for covering said opening of said wafer cassette; an openerdisposed on said cover for opening said cover, wherein said cover ismovable from a shut position to a separated position; and a separatingdevice connected with said opener for moving said opener, thereby saidcover being moved from said shut position to said separated position.